Effect of contact metallization on electromigration reliability of Pb-free solder joints

被引:86
作者
Ding, Min [1 ]
Wang, Guotao
Chao, Brook
Ho, Paul S.
Su, Peng
Uehling, Trent
机构
[1] Univ Texas, Austin, TX 78712 USA
[2] Freescale Semicond Inc, Austin, TX 78735 USA
关键词
D O I
10.1063/1.2193037
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of underbump metallization (UBM) on electromigration (EM) lifetime and failure mechanism has been investigated for Pb-free solder bumps of 97Sn3Ag composition in the temperature range of 110-155 degrees C. The EM lifetime of the SnAg Pb-free solders with either Cu or Ni UBM was found to be better than the eutectic SnPb (63Sn37Pb) solders but worse than high-Pb (95Pb5Sn) solders. In the test temperature range, the EM lifetimes were found to be comparable for Cu and Ni UBMs but with different activation energies: 0.64-0.72 eV for Cu UBM and 1.03-1.11 eV for Ni UBM. EM failure was observed only in solder bumps with electron current flow from UBM to the substrate. Failure analysis revealed that EM damage was initiated by the formation of intermetallic compounds (IMC) at the UBM/solder interface which was found to be significantly enhanced by mass transport driven by the electron current. Under EM, the continued growth of IMC with the dissolution of the UBM and the accumulation of Kirkendall voids resulted in the formation of interfacial cracks and eventual EM failure of the solder bump. For Ni UBM, the IMC formation was dominated by the Ni3Sn4 phase while for Cu UBM, a bilayer of Cu3Sn/Cu6Sn5 was found. Void formation at the Cu6Sn5/solder interface was found to be important in controlling the EM lifetime of the Cu UBM solder. (C) 2006 American Institute of Physics.
引用
收藏
页数:6
相关论文
共 14 条
[1]  
[Anonymous], 2003, INT TECHN ROADM SEM
[2]  
CHAO HL, 2006, IN PRESS INT REL PHY
[3]   Formation and growth of interfacial intermetallic layers in eutectic Sn-Ag solder and its composite solder joints [J].
Choi, S ;
Lucas, JP ;
Subramanian, KN ;
Bieler, TR .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2000, 11 (06) :497-502
[4]   Reliability analysis for encapsulated interconnect lines under dc and pulsed dc current using a continuum electromigration transport model [J].
Clement, JJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (12) :5991-6000
[5]   Electromigration study of high lead solders in flip-chip packages using the wheatstone bridge method [J].
Ding, M ;
Matsuhashi, H ;
Wang, GT ;
Ho, PS ;
Marathe, A ;
Master, R ;
Pham, V .
54TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2004, :968-973
[6]   Polarity effect of electromigration on kinetics of intermetallic compound formation in Pb-free solder V-groove samples [J].
Gan, H ;
Tu, KN .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (06)
[7]   Electromigration failure in flip chip solder joints due to rapid dissolution of copper [J].
Hu, YC ;
Lin, YH ;
Kao, CR ;
Tu, KN .
JOURNAL OF MATERIALS RESEARCH, 2003, 18 (11) :2544-2548
[8]  
Nowick A. S., 1975, DIFFUSION SOLIDS REC, P172
[9]   CURRENT-DENSITY DEPENDENCE OF ELECTROMIGRATION FAILURE OF SUBMICRON WIDTH, MULTILAYER AL-ALLOY CONDUCTORS [J].
OATES, AS .
APPLIED PHYSICS LETTERS, 1995, 66 (12) :1475-1477
[10]   Statistics of electromigration early failures in Cu/oxide dual-damascene interconnects [J].
Ogawa, ET ;
Lee, KD ;
Matsuhashi, H ;
Ko, KS ;
Justison, PR ;
Ramamurthi, AN ;
Bierwag, AJ ;
Ho, PS ;
Blaschke, VA ;
Havemann, RH .
39TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM 2001, 2001, :341-349