Synthesis of cubic boron nitride thin films

被引：58

作者：

McKenzie, DR ^{[1
]}

McFall, WD ^{[1
]}

Reisch, S ^{[1
]}

James, BW ^{[1
]}

Falconer, IS ^{[1
]}

Boswell, RW ^{[1
]}

Persing, H ^{[1
]}

Perry, AJ ^{[1
]}

Durandet, A ^{[1
]}

机构：

[1] AUSTRALIAN NATL UNIV,RES SCH PHYS SCI & ENGN,CANBERRA,ACT 2601,AUSTRALIA

来源：

SURFACE & COATINGS TECHNOLOGY | 1996年 / 78卷 / 1-3期

基金：

澳大利亚研究理事会;

关键词：

cubic boron nitride; ion plating; helicon wave; plasmas; thin films;

D O I：

10.1016/0257-8972(95)02419-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An equilibrium thermodynamic analysis of the Gibbs free energy in a non-hydrostatic stress field is applied to the formation of boron nitride thin films. The theory predicts a specific sequence of microstructures from non-oriented hexagonal boron nitride, through oriented hexagonal boron nitride and finally cubic boron nitride. It also predicts a threshold stress for cubic boron nitride formation. These predictions are in agreement with experimental observations reported here and made by others. The synthesis of cubic boron nitride in a new helicon wave plasma source is demonstrated. The operating parameters which produce the cubic phase are determined.

引用

页码：255 / 262

页数：8

共 23 条

[1] BERMAN R, 1955, Z ELEKTROCHEM, V59, P333
[2] Boswell R. W., 1970, Physics Letters A, V33, P457, DOI 10.1016/0375-9601(70)90606-7
[3] BUNDY FP, 1963, J CHEM PHYS, V38
[4] CHEN FF, INTRO PLASMA PHYSICS, V1, P131
[5] A SIMPLE-MODEL FOR THE FORMATION OF COMPRESSIVE STRESS IN THIN-FILMS BY ION-BOMBARDMENT
DAVIS, CA
[J]. THIN SOLID FILMS, 1993, 226 (01) : 30 - 34
[6] FABIS PM, 1990, J VAC SCI TECHNOL A, V8
[7] PSEUDOPOTENTIAL TOTAL-ENERGY STUDY OF THE TRANSITION FROM RHOMBOHEDRAL GRAPHITE TO DIAMOND
FAHY, S
LOUIE, SG
COHEN, ML
[J]. PHYSICAL REVIEW B, 1986, 34 (02): : 1191 - 1199
[8] FIELD JE, 1979, PROPERTIES DIAMOND, P647
[9] PREPARATION OF CUBIC BORON-NITRIDE FILM BY ACTIVATED REACTIVE EVAPORATION WITH A GAS ACTIVATION NOZZLE
INAGAWA, K
WATANABE, K
OHSONE, H
SAITOH, K
ITOH, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2696 - 2700
[10] KELLY BT, 1981, PHYSICS GRAPHITE, P74

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