PREPARATION OF CUBIC BORON-NITRIDE FILM BY ACTIVATED REACTIVE EVAPORATION WITH A GAS ACTIVATION NOZZLE

被引：120

作者：

INAGAWA, K

WATANABE, K

OHSONE, H

SAITOH, K

ITOH, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574722

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2696 / 2700

页数：5

共 14 条

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[8] ION-BEAM SYNTHESIS OF CUBIC BORON-NITRIDE
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