ION-BEAM SYNTHESIS OF CUBIC BORON-NITRIDE

被引：93

作者：

SHANFIELD, S

WOLFSON, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572124

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：323 / 325

页数：3

共 6 条

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[6] STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES [J].

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