ION-BEAM DEPOSITION OF SPECIAL FILM STRUCTURES

被引：133

作者：

WEISSMANTEL, C

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570719

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：179 / 185

页数：7

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