STRUCTURAL INVESTIGATION OF THIN-FILMS OF DIAMONDLIKE CARBON

被引：222

作者：

VORA, H

MORAVEC, TJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 10期

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D O I：

10.1063/1.328514

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：6151 / 6157

页数：7

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