SYNTHESIS OF CUBIC BORON-NITRIDE FILMS BY ACTIVATED REACTIVE EVAPORATION OF H3BO3

被引：34

作者：

CHOPRA, KL

AGARWAL, V

VANKAR, VD

DESHPANDEY, CV

BUNSHAH, RF

机构：

[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA

[2] UNIV CALIF LOS ANGELES,SCH ENGN & APPL SCI,SCH ENGN & APPL SCI,LOS ANGELES,CA 90024

来源：

THIN SOLID FILMS | 1985年 / 126卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90325-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：307 / 312

页数：6

共 15 条

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[9] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT
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