Hybrid laser-magnetron technology for carbon composite coating

被引：12

作者：

Jelinek, M. ^{[1
,2
]}

Kocourek, T. ^{[1
,2
]}

Kadlec, Ja. ^{[3
]}

Zemek, J. ^{[1
]}

机构：

[1] Inst Phys, Prague 18221 8, Czech Republic

[2] Czech Tech Univ, Fac Biomed Engn, Kladno 27201, Czech Republic

[3] Mil Acad, Brno, Czech Republic

来源：

LASER PHYSICS | 2009年 / 19卷 / 02期

关键词：

THIN-FILMS; TRIBOLOGICAL PROPERTIES; DEPOSITION; WEAR; CARBIDES;

D O I：

10.1134/S1054660X09020017

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm(2) were prepared. Crystalline TiC films were grown at room substrate temperature.

引用

页码：149 / 153

页数：5

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