A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch

被引：67

作者：

Chen, RT ^{[1
]}

Nguyen, H ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1999年 / 11卷 / 11期

关键词：

MEMS; micromachined fiber optic switch; optical switch; stress;

D O I：

10.1109/68.803057

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-voltage electrostatically actuated 2 x 2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch, Large mirror displacement (300 mu m) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 mu s), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.

引用

页码：1396 / 1398

页数：3

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