Characterization and modeling of a microwave driven xenon excimer lamp

被引:24
作者
Ametepe, JD [1 ]
Diggs, J
Manos, DM
Kelley, MJ
机构
[1] Coll William & Mary, Dept Appl Sci, Williamsburg, VA 23187 USA
[2] DuPont Co Inc, Cent Res, Wilmington, DE 19880 USA
关键词
D O I
10.1063/1.370547
中图分类号
O59 [应用物理学];
学科分类号
摘要
We designed, constructed, and studied a novel probe-coupled 2.45 GHz microwave arrangement to drive a Xe excimer lamp. Electrical efficiency and output power in the 160-200 nm range (Xe second continuum) both increased with pressure and input power up to 1500 Torr and 600 W (42.5 W/cm(3)), respectively. The maximum in-range optical power was 60 W, more than 80% of the total. Cooling with liquid nitrogen boil off rather than room air more than doubled output power. Model calculation and experimental measurement of the angular distribution of emission find considerable intensity well away from the surface normal. Correcting experimental measurements of excimer lamp output power accordingly brings good agreement with the 20%-40% electrical efficiency predicted by theory. (C) 1999 American Institute of Physics. [S0021-8979(99)02111-8].
引用
收藏
页码:7505 / 7510
页数:6
相关论文
共 69 条
  • [61] VIZIR VA, 1995, KVANTOVAYA ELEKTRON+, V22, P519, DOI 10.1070/QE1995v025n05ABEH000396
  • [62] Volkova G. A., 1984, Journal of Applied Spectroscopy, V41, P1194, DOI 10.1007/BF00659516
  • [63] Volkova G. A., 1984, ZH PRIKL SPEKTROSK, V41, P681
  • [64] WOOD CH, 1989, Patent No. 4887008
  • [65] WOOD CH, 1987, Patent No. 4703173
  • [66] WOOD CH, 1987, Patent No. 4652790
  • [67] MODIFICATION OF POLYMERS WITH UV EXCIMER RADIATION FROM LASERS AND LAMPS
    ZHANG, JY
    ESROM, H
    KOGELSCHATZ, U
    EMIG, G
    [J]. JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1994, 8 (10) : 1179 - 1210
  • [68] ZHANG JY, 1993, APPL SURF SCI, V69, P299, DOI 10.1016/0169-4332(93)90522-D
  • [69] ZHANG JY, 1993, THESIS KARLSRUHE U G