共 22 条
[12]
Korsunskii B.L., 1997, RUSS CHEM REV+, V66, P901, DOI [10.1070/rc1997v066n11abeh000378, DOI 10.1070/RC1997V066N11ABEH000378]
[16]
Teer DG, 1997, Magnetron sputter ion plating, Patent No. [EP0521045B1, 0521045]
[17]
TETER DM, 1988, MRS B JAN, P22
[18]
TONSHOFF HK, 1999, 1 INT C THE COAT MAN, P1
[20]
Veprek S, 1999, J VAC SCI TECHNOL A, V17, P2401, DOI 10.1116/1.581977