Plasma beam deposited amorphous hydrogenated carbon: Improved film quality at higher growth rate

High quality diamondlike a-C:H has been deposited, at low ion bombardment energies, from an expanding thermal argon/acetylene plasma at high growth rate, it is observed that quality improvement, in terms of hardness, is equivalent to maximization of the refractive index. The highest refractive indices are obtained when the admired acetylene flow and the argon ion flux emanating from the plasma source are comparable in magnitude, which suggests critical loading. This also indicates that the acetylene has to be dissociated only once. Combination with the observed quality behavior at higher deposition rates suggests that there is one preferred hydrocarbon radical for deposition, probably C2H. (C) 1996 American Institute of Physics.