A comparison of the optical properties of amorphous and polycrystalline PZT thin films deposited by the sol-crel method

被引：20

作者：

Yang, SH ^{[1
]}

Zhang, YL ^{[1
]}

Mo, D ^{[1
]}

机构：

[1] Zhongshan Univ, Dept Phys, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2006年 / 127卷 / 2-3期

基金：

中国国家自然科学基金;

关键词：

PZT thin films; sol-gel technique; spectroscopic ellipsometry; optical constants;

D O I：

10.1016/j.mseb.2005.10.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Stoichiometric Pb(Zr(x)Ti((1-x))O(3)) (PZT) thin films deposited on Si(100) substrates have been prepared by the sol-gel technique. Two sets of films of amorphous and polycrystalline, containing 20%, 30%, 50%, and 60% Ti, were prepared and investigated. The microstructures and surface morphologies of the films have been studied by X-ray diffraction and atomic force microscopy. The optical properties were studied by spectroscopic ellipsometry (SE) in the UV-visible region. Using a four-phase fitting model, the refractive index it and extinction coefficient k was obtained by analyzing the SE spectra. The optical band gap energies E(g) for these films were determined under the assumption of a direct band-to-band transition. The results show that the refractive index, extinction coefficient, and band gap energy of the films show a systematic variation with compositions and microstructures. The optical band gap energy of the amorphous PZT films shift to high energy is mainly due to the quantum-size effect. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：117 / 122

页数：6

共 30 条

[1] FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].