Parametric frequency tuning of phase-locked nanoelectromechanical resonators

被引:16
作者
Kraus, A
Erbe, A
Blick, RH
Corso, G
Richter, K
机构
[1] Univ Munich, Ctr Nanosci, D-80539 Munich, Germany
[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany
[3] Max Planck Inst Phys Komplexer Syst, D-01187 Dresden, Germany
关键词
D O I
10.1063/1.1412431
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present measurements on nanoelectromechanical systems fabricated in semiconductor materials suited for operating frequencies in the radio band. We demonstrate how to achieve parametric frequency tuning of nanoelectromechanical resonators required for radio frequency sensor and communication applications. (C) 2001 American Institute of Physics.
引用
收藏
页码:3521 / 3523
页数:3
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