A positional accuracy study of a micro-EDM machine

被引：4

作者：

Almond, H ^{[1
]}

Bhogal, J ^{[1
]}

Allen, DM ^{[1
]}

机构：

[1] Cranfield Univ, Sch Ind & Mfg Sci, Bedford MK43 0AL, England

来源：

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷

关键词：

micro-electrodischarge machining; micro-EDM; micro-holes; positional accuracy; measuring systems; grid encoder;

D O I：

10.1117/12.341183

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micro-electrodischarge machining (micro-EDM) is used to machine small features such as holes, cavities and slots with high aspect ratios in electrically-conductive materials for various applications including medical implants, printing devices, dies and spray nozzies. In this study, the positional accuracy of a micro-EDM machine was assessed whilst simulating the machining of an array of holes. The measurement involved the use of a diffraction grid plate and non-contact scanning head. This enabled various conclusions to be drawn as to the relative deviations experienced when machining small features such as circle divide 50 mu m holes.

引用

页码：1113 / 1124

页数：12

共 14 条

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