A highly sensitive quartz-crystal microbalance for sputtering investigations in slow ion-surface collisions

被引：58

作者：

Hayderer, G ^{[1
]}

Schmid, M ^{[1
]}

Varga, P ^{[1
]}

Winter, HP ^{[1
]}

Aumayr, F ^{[1
]}

机构：

[1] Vienna Tech Univ, Inst Allgemeine Phys, A-1040 Vienna, Austria

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1999年 / 70卷 / 09期

关键词：

D O I：

10.1063/1.1149979

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A quartz-crystal microbalance technique for measuring total sputter yields in ion-surface collisions is described. The electronic circuit to drive the quartz crystal ensures low noise and high frequency stability. By measuring total sputter yields for impact of singly charged ions on LiF target films a sensitivity limit of 0.5% of a monolayer per minute could be achieved. (C) 1999 American Institute of Physics. [S0034-6748(99)03509-1].

引用

页码：3696 / 3700

页数：5

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