Improvement of measurement accuracy in shadow moire by considering the influence of harmonics in the moire profile

被引：13

作者：

Arai, Y

Yokozeki, S

机构：

[1] Kansai Univ, Fac Engn, Dept Engn Mech, Suita, Osaka 5648680, Japan

[2] Kyushu Inst Technol, Fac Comp Sci & Syst Engn, Iizuka, Fukuoka 820, Japan

来源：

APPLIED OPTICS | 1999年 / 38卷 / 16期

关键词：

D O I：

10.1364/AO.38.003503

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A method for high-resolution three-dimensional shape measurement for a shadow moire system is proposed. To increase the resolving power of the method, the problem caused by the harmonics of the moire profile needs to be solved. It is well known that moire fringes in a shadow moire system have a nonsinusoidal profile caused by harmonics. The influence of the harmonics in moire profile on the measurement accuracy of the method is discussed. The method is improved to eliminate the error caused by the harmonics in the moire profile. Both Simulation and experimental results show that the improved method can effectively reduce the influence of harmonics. (C) 1999 Optical Society of America. OCIS codes: 120.4120, 150.6910.

引用

页码：3503 / 3507

页数：5

共 10 条

[1] FRINGE-SCANNING METHOD USING A GENERAL FUNCTION FOR SHADOW MOIRE [J].