Detection of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films prepared on LaNiO3 buffered metal substrates with Raman spectroscopy

被引：33

作者：

Cheng, JR ^{[1
]}

He, L ^{[1
]}

Yu, SW ^{[1
]}

Meng, ZY ^{[1
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 20072, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 15期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1063/1.2194869

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Sol-gel derived Pb(Zr0.53Ti0.47)O-3 (PZT) thin films have been prepared on LaNiO3 buffered Si, Ti, NiCr, and stainless steel. Raman scattering was carried out on both PZT thin films and powders. Compared with PZT powders, notable shifts of Raman modes to the lower frequency were observed in the spectra of PZT thin films on metal substrates, whereas to a higher frequency for PZT on Si. The correlation between Raman shifts and thermal stresses agrees well with the Curie-Weiss law, which indicates that the Raman scattering technique provides an effective way to estimate the magnitude and types of residual stresses in the film.

引用

页数：3

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