Growth of PbS thin films on silicon substrate by SILAR technique

被引:59
作者
Puiso, J
Tamulevicius, S
Laukaitis, G
Lindroos, S
Leskelä, M
Snitka, V
机构
[1] Kaunas Univ Technol, Dept Phys, LT-3031 Kaunas, Lithuania
[2] Univ Helsinki, Dept Chem, FIN-00014 Helsinki, Finland
[3] Kaunas Univ Technol, Sci Ctr Microsyst & Nanotechnol, LT-3031 Kaunas, Lithuania
关键词
PbS; thin films; residual stress; SILAR;
D O I
10.1016/S0040-6090(01)01662-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lead sulfide thin films were grown on (100)Si and (111)Si crystalline substrates by successive ionic layer adsorption and reaction, (SILAR), technique from solution phase at room temperature and normal pressure. The stress development. crystallinity and crystallite size, morphology and roughness and composition of the films were characterized as a function of the film thickness. The PbS thin films were polycrystalline and cubic. The residual stress in PbS was tensile and changed depending on the growth mode and thickness of the PbS films. (C) 2002 Elsevier Science B.V All fights reserved.
引用
收藏
页码:457 / 461
页数:5
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