8-9 and 14-15 μm two-color 640x486 GaAs/AlGaAs Quantum Well Infrared Photodetector (QWIP) focal plane array camera

被引:42
作者
Gunapala, SD [1 ]
Bandara, SV [1 ]
Singh, A [1 ]
Liu, JK [1 ]
Rafol, SB [1 ]
Luong, EM [1 ]
Mumolo, JM [1 ]
Tran, NQ [1 ]
Vincent, JD [1 ]
Shott, CA [1 ]
Long, J [1 ]
LeVan, PD [1 ]
机构
[1] CALTECH, Jet Prop Lab, Ctr Space Microelect Technol, Pasadena, CA 91109 USA
来源
INFRARED TECHNOLOGY AND APPLICATIONS XXV | 1999年 / 3698卷
关键词
D O I
10.1117/12.354502
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An optimized long-wavelength two-color Quantum Well Infrared Photodetector (QWIP) device structure has been designed. This device structure was grown on a three-inch semi-insulating GaAs substrate by molecular beam epitaxy (MBE). This wafer was processed into several 640x486 format monolithically integrated 8-9 and 14-15 mu m two-color (or dual wavelength) QWIP focal plane arrays (FPAs). These FPAs were then hybridized to 640x486 silicon CMOS readout multiplexers. A thinned (i.e., substrate removed) FPA hybrid was integrated into a liquid helium cooled dewar to perform electrical and optical characterization and to demonstrate simultaneous two-color imagery. The 8-9 mu m detectors in the FPA have shown background limited performance (BLIP) at 70 K operating temperature, at 300 K background with f/2 cold stop. The 14-15 mu m detectors of the FPA have reached BLIP at 40 K operating temperature at the same background conditions. In this paper we discuss the performance of this long-wavelength dualband QWIP FPA in quantum efficiency, detectivity, noise equivalent temperature difference (NE Delta T), uniformity, and operability.
引用
收藏
页码:687 / 697
页数:11
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