Improvement of the sintering and dielectric characteristics of surface barrier layer capacitors by CuO addition

被引:90
作者
Yang, CF
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 03期
关键词
reduction; reoxidation; anneal; grain size; threshold time;
D O I
10.1143/JJAP.35.1806
中图分类号
O59 [应用物理学];
学科分类号
摘要
Calcined (Ba0.8Sr0.2) (Ti0.9Zr0.1)O-3 (BSTZ) with added CuO is used as an improved material with which to fabricate surface (or reduction-reoxidation) barrier layer capacitors (BLCs). The CuO-containing BSTZ appears to have less temperature, frequency, and bias dependence of the dielectric characteristics and a lower sintering temperature (1325 degrees C versus 1390 degrees C) as compared to BSTZ without CuO. For the same annealing conditions, for example, annealing at 1000 degrees C for 60 min, the effective dielectric constant of CuO-added BSTZ (sintering at 1325 degrees C) is larger than that of BSTZ without CuO (sintering at 1390 degrees C). The addition of MnO accelerates the annealing process, causing the semiconductive ceramics to reoxidize into dielectric materials within 30 min. CuO addition can lead to an important competitive merit for BSTZ dielectrics, especially in the fabrication of surface BLCs with an easily controllable fabrication process to give stable dielectric characteristics.
引用
收藏
页码:1806 / 1813
页数:8
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