Transparent functional oxide stretchable electronics: micro-tectonics enabled high strain electrodes

被引：65

作者：

Gutruf, Philipp ^{[1
,2
]}

Shah, Charan M. ^{[1
]}

Walia, Sumeet ^{[1
]}

Nili, Hussein ^{[1
]}

Zoolfakar, Ahmad S. ^{[1
]}

Karnutsch, Christian ^{[2
]}

Kalantar-zadeh, Kourosh ^{[1
]}

Sriram, Sharath ^{[1
]}

Bhaskaran, Madhu ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Funct Mat & Microsyst Res Grp, Melbourne, Vic 3001, Australia

[2] Karlsruhe Univ Appl Sci, Inst Optofluid & Integrated Nanophoton, Dept Elect Engn & Informat Technol, Karlsruhe, Germany

来源：

NPG ASIA MATERIALS | 2013年 / 5卷

基金：

澳大利亚研究理事会;

关键词：

flexible electronics; functional oxides; high-temperature oxides; ITO; PDMS; transparent materials; ZnO; THIN-FILMS; TRANSISTORS; MICRODEVICES; PERFORMANCE; FABRICATION; SKIN;

D O I：

10.1038/am.2013.41

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fully transparent and flexible electronic substrates that incorporate functional materials are the precursors to realising next-generation devices with sensing, self-powering and portable functionalities. Here, we demonstrate a universal process for transferring planar, transparent functional oxide thin films on to elastomeric polydimethylsiloxane (PDMS) substrates. This process overcomes the challenge of incorporating high-temperature-processed crystalline oxide materials with low-temperature organic substrates. The functionality of the process is demonstrated using indium tin oxide (ITO) thin films to realise fully transparent and flexible resistors. The ITO thin films on PDMS are shown to withstand uniaxial strains of 15%, enabled by microstructure tectonics. Furthermore, zinc oxide was transferred to display the versatility of this transfer process. Such a ubiquitous process for the transfer of functional thin films to elastomeric substrates will pave the way for touch sensing and energy harvesting for displays and electronics with flexible and transparent characteristics.

引用

页码：e62 / e62

页数：7

共 29 条

[1] Effect of multi-layered bottom electrodes on the orientation of strontium-doped lead zirconate titanate thin films [J].