Improvement in quantum efficiency of thin film Si solar cells due to the suppression of optical reflectance at transparent conducting oxide/Si interface by TiO2/ZnO antireflection coating

被引：71

作者：

Fujibayashi, T

Matsui, T

Kondo, M

机构：

[1] Tokyo Inst Technol, Dept Innovat & Engineered Mat, Midori Ku, Yokohama, Kanagawa 2268502, Japan

[2] Natl Inst Adv Ind Sci & Technol, Res Ctr Photovolt, Tsukuba, Ibaraki 3058568, Japan

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 18期

关键词：

D O I：

10.1063/1.2200741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Through experiments and optical simulations the suppression of optical reflection at the transparent conducting oxide/Si interface of thin film Si p-i-n solar cells is shown by application of a TiO2 antireflection (AR) coating. In addition, a deterioration in the transmittance of TiO2 is shown to be due to its reduction by a H-2 plasma, which in turn deteriorates the quantum efficiency (QE) at long wavelength. Such a reduction is completely prevented by a ZnO overcoat of similar to 10 nm. Applying the TiO2/ZnO AR coating realizes an improvement in QE at all wavelengths with an increase of up to similar to 10% at 550 nm.

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页数：3

相关论文

共 14 条

[1] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[2]

FERREIRA GM, 2001, MATER RES SOC S P, V664

[3]

FERREIRA GM, 2003, MATER RES SOC S P, V762

[4] Optical confinement in high-efficiency a-Si solar cells with textured surfaces [J].

Hishikawa, Y ;

Maruyama, E ;

Yata, S ;

Tanaka, M ;

Kiyama, S ;

Tsuda, S .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 49 (1-4) :143-148

[5] Towards high-efficiency thin-film silicon solar cells with the ''micromorph'' concept [J].

Meier, J ;

Dubail, S ;

Platz, R ;

Torres, P ;

Kroll, U ;

Selvan, JAA ;

Vaucher, NP ;

Hof, C ;

Fischer, D ;

Keppner, H ;

Fluckiger, R ;

Shah, A ;

Shklover, V ;

Ufert, KD .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 49 (1-4) :35-44

[6] Key issue for the fabrication of high-efficiency microcrystalline silicon thin-film solar cells at low temperatures [J].

Nasuno, Y ;

Kondo, M ;

Matsuda, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (10) :5912-5918

[7] Hydrogen-radical durability of TiO2 thin films for protecting transparent conducting oxide for Si thin film solar cells [J].

Natsuhara, H ;

Ohashi, T ;

Ogawa, S ;

Yoshida, N ;

Itoh, T ;

Nonomura, S ;

Fukawa, M ;

Sato, K .

THIN SOLID FILMS, 2003, 430 (1-2) :253-256

[8] QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY AND ELECTRON RANGES [J].

SEAH, MP .

SURFACE SCIENCE, 1972, 32 (03) :703-&

[9] Photovoltaic technology: The case for thin-film solar cells [J].

Shah, A ;

Torres, P ;

Tscharner, R ;

Wyrsch, N ;

Keppner, H .

SCIENCE, 1999, 285 (5428) :692-698

[10] Light trapping and optical losses in microcrystalline silicon pin solar cells deposited on surface-textured glass/ZnO substrates [J].

Springer, J ;

Rech, B ;

Reetz, W ;

Müller, J ;

Vanecek, M .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2005, 85 (01) :1-11