Property, application and preparation of diamond-like film

被引：19

作者：

Liang, F ^{[1
]}

Yan, XJ ^{[1
]}

机构：

[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China

来源：

ACTA PHYSICA SINICA | 1999年 / 48卷 / 06期

关键词：

D O I：

10.7498/aps.48.1095

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present the structure features of diamond-like films, discuss the relation between the coefficients in the preparation of diamond-like films-and analyse how these coefficients affect the structure and property of the films in detail.

引用

页码：1095 / 1102

页数：8

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