Precise laser ablation with ultrashort pulses

被引：275

作者：

Momma, C

Nolte, S

Chichkov, BN

vonAlvensleben, F

Tunnermann, A

机构：

[1] Laser Zentrum Hannover e.V., 30419 Hannover

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

Femtosecond lasers; Laser ablation; Material processing; Microstructuring; Short-pulse lasers;

D O I：

10.1016/S0169-4332(96)00613-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser ablation of solid targets by Ti:sapphire laser radiation is studied. The targets are irradiated by 150 fs-5 ns laser pulses with a fluence in the range of several J/cm(2). Measurements on the ablation depth yield an effective penetration depth higher than the optical penetration depth. Advantages and potentials of sub-picosecond laser radiation for the ablation and for the microstructuring of metals are demonstrated.

引用

页码：15 / 19

页数：5

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