Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

被引：25

作者：

Äyräs, P ^{[1
]}

Rantala, JT

Levy, R

Descour, MR

Honkanen, S

Peyghambarian, H

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

[2] VTT Elect, FIN-90570 Oulu, Finland

来源：

THIN SOLID FILMS | 1999年 / 352卷 / 1-2期

关键词：

glass; sol-gel; surface structure;

D O I：

10.1016/S0040-6090(99)00404-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 mu m is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：9 / 12

页数：4

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