Microcontact printing with octadecanethiol

被引：14

作者：

Bass, RB ^{[1
]}

Lichtenberger, AW ^{[1
]}

机构：

[1] Univ Virginia, Dept Elect & Comp Engn, Charlottesville, VA 22903 USA

来源：

APPLIED SURFACE SCIENCE | 2004年 / 226卷 / 04期

关键词：

microcontact printing; soft lithography; self-assembled monolayers;

D O I：

10.1016/j.apsusc.2003.10.042

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We investigate various alkanethiol self-assembled monolayer inks for microcontact printing patterns on gold substrates. Our research compares hexadecanethiol with an alkanethiol of higher molecular weight, octadecanethiol. Transport mechanisms of alkanethiols along the gold surface and through the ambient are highly dependant upon the molecular weight of the thiols used, and thus are of particular importance when patterning submicron features. Monolayers of octadecanethiol are well suited for patterning such features on gold. The quality of transferred patterns printed with octadecanethiol and hexadecanethiol are examined. The gold patterns fabricated in this work were analyzed via scanning electron microscopy. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：335 / 340

页数：6

共 14 条

[1] Precision techniques for whole wafer dicing and thinning of superconducting mixer circuits [J].

Bishop, WL ;

Summers, DM ;

Lichtenberger, AW .

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) :171-174

[2] Self-assembled monolayers of eicosanethiol on palladium and their use in microcontact printing [J].

Carvalho, A ;

Geissler, M ;

Schmid, H ;

Michel, B ;

Delamarche, E .

LANGMUIR, 2002, 18 (06) :2406-2412

[3] Stability of molded polydimethylsiloxane microstructures [J].

Delamarche, E ;

Schmid, H ;

Michel, B ;

Biebuyck, H .

ADVANCED MATERIALS, 1997, 9 (09) :741-746

[4] Transport mechanisms of alkanethiols during microcontact printing on gold [J].

Delamarche, E ;

Schmid, H ;

Bietsch, A ;

Larsen, NB ;

Rothuizen, H ;

Michel, B ;

Biebuyck, H .

JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (18) :3324-3334

[5] Enhanced barrier properties of alkanethiol-coated gold electrodes by 1-octanol in solution [J].

French, M ;

Creager, SE .

LANGMUIR, 1998, 14 (08) :2129-2133

[6] Defect-tolerant and directional wet-etch systems for using monolayers as resists [J].

Geissler, M ;

Schmid, H ;

Bietsch, A ;

Michel, B ;

Delamarche, E .

LANGMUIR, 2002, 18 (06) :2374-2377

[7] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].

KUMAR, A ;

WHITESIDES, GM .

APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004

[8] SELECTIVE REACTIVE ION ETCHING OF SILICON-NITRIDE OVER SILICON USING CHF3 WITH N-2 ADDITION [J].

LI, YX ;

FRENCH, PJ ;

WOLFFENBUTTEL, RF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (05) :2008-2012

[9] Contact-inking stamps for microcontact printing of Alkanethiols on gold [J].

Libioulle, L ;

Bietsch, A ;

Schmid, H ;

Michel, B ;

Delamarche, E .

LANGMUIR, 1999, 15 (02) :300-304

[10] TMAH/IPA ANISOTROPIC ETCHING CHARACTERISTICS [J].

MERLOS, A ;

ACERO, M ;

BAO, MH ;

BAUSELLS, J ;

ESTEVE, J .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :737-743

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