学术探索
学术期刊
新闻热点
数据分析
智能评审

SAW NOx gas sensor using WO3 thin-film sensitive coating

被引：40
作者：
Penza, M
Vasanelli, L
机构：
[1] UNIV LECCE,I-73100 LECCE,ITALY
[2] CNR,IME,I-73100 LECCE,ITALY
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 41卷 / 1-3期
关键词：
surface acoustic wave NOx gas sensor; WO3 thin films; surface acoustic wave;
D O I：
10.1016/S0925-4005(97)80274-2
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A surface acoustic wave (SAW) delay line has been implemented onto a 128 degrees YX-LiNbO3 piezoelectric substrate as gas sensor. WO3 thin films have been deposited by reactive rf sputtering onto the SAW propagation path as gas sensitive coating. The SAW sensing element detects NO and NO2 in dry air in the gas concentration range 0-4400 ppm and 0-100 ppm, respectively, and in the temperature range 100-250 degrees C. The SAW phase response towards NOx is higher than that of two main interfering gases, such as CO and CH4. Preliminary results on the sensing characteristics of the SAW NOx gas detector based on WO3 thin films are reported and discussed. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：31 / 36
页数：6
相关论文
共 8 条
[1]   DETECTION OF COMBUSTIBLE GASES BY MEANS OF A ZNO-ON-SI SURFACE-ACOUSTIC-WAVE (SAW) DELAY-LINE [J].
ANISIMKIN, VI ;
PENZA, M ;
VALENTINI, A ;
QUARANTA, F ;
VASANELLI, L .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) :197-201
[2]  
INOUE T, 1994, 5 INT M CHEM SENS IM, V1, P490
[3]   Sub-ppm NO2 sensors based on nanosized thin films of titanium-tungsten oxides [J].
Nelli, P ;
Depero, LE ;
Ferroni, M ;
Groppelli, S ;
Guidi, V ;
Ronconi, F ;
Sangaletti, L ;
Sberveglieri, G .
SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) :89-92
[4]   A NEW HIGH-FREQUENCY HIGH-SENSITIVITY SAW DEVICE FOR NO2 GAS-DETECTION IN THE SUB-PPM RANGE [J].
RAPP, M ;
BINZ, D ;
KABBE, I ;
VONSCHICKFUS, M ;
HUNKLINGER, S ;
FUCHS, H ;
SCHREPP, W ;
FLEISCHMANN, B .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (1-2) :103-108
[5]   WO3 SPUTTERED THIN-FILMS FOR NOX MONITORING [J].
SBERVEGLIERI, G ;
DEPERO, L ;
GROPPELLI, S ;
NELLI, P .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :89-92
[6]   STABILITY, SENSITIVITY AND SELECTIVITY OF TUNGSTEN TRIOXIDE FILMS FOR SENSING APPLICATIONS [J].
SMITH, DJ ;
VETELINO, JF ;
FALCONER, RS ;
WITTMAN, EL .
SENSORS AND ACTUATORS B-CHEMICAL, 1993, 13 (1-3) :264-268
[7]  
VETELINO JF, 1987, IEEE T ULTRASON FERR, P156
[8]  
Yamazoe N., 1992, Gas Sens, P1, DOI [10.1007/978-94-011-2737-0_1, DOI 10.1007/978-94-011-2737-0_1]
1