Scanning force microscopy investigation of the Pb(Zr0.25Ti0.75)O3/Pt interface

被引:44
作者
Lu, XM
Schlaphof, F
Grafström, S
Loppacher, C
Eng, LM [1 ]
Suchaneck, G
Gerlach, G
机构
[1] Tech Univ Dresden, Inst Appl Photophys, D-01062 Dresden, Germany
[2] Tech Univ Dresden, Inst Solid State Elect, D-01062 Dresden, Germany
[3] Nanjing Univ, Dept Phys, Nanjing 210008, Peoples R China
关键词
D O I
10.1063/1.1512961
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on a novel approach for the investigation of the Pb(ZrxTi1-x)O-3/Pt interface applying scanning force microscopy techniques. Ferroelectric samples (PZT film /Pt/SiO2/Si) were polished at a shallow angle (similar to6.1degrees) thereby enlarging the film cross section from a 430 nm film thickness to a width of more than 4 mum. Piezoresponse force microscopy and Kelvin probe force microscopy were applied in order to deduce the dielectric polarization P and local potential distribution over the full cross section. We clearly observe a transition layer with a thickness of similar to240 nm which manifests itself both in a gradual decrease of the piezoresponse signal as a function of film thickness and in a corresponding variation of the surface potential. Furthermore, after polarization reversal due to a dc voltage applied to the tip, a different retention behavior was observed within the transition layer. The results are tentatively attributed to negatively charged defects accumulated at the PZT/Pt interface. (C) 2002 American Institute of Physics.
引用
收藏
页码:3215 / 3217
页数:3
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