Characterization of ZnO/DLC/Si saw devices using FCVA-produced DLC films

被引：12

作者：

Lee, MH ^{[1
]}

Chang, SM ^{[1
]}

Park, CK ^{[1
]}

Lee, JB ^{[1
]}

Park, JS ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect Engn, Seoul, South Korea

来源：

PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION | 2002年

关键词：

DLC; FCVA deposition; sp(3) fraction; piezoelectric ZnO; SAW device; frequency response;

D O I：

10.1109/FREQ.2002.1075859

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Surface acoustic wave (SAW) filters were fabricated using a multilayer structure of ZnO/diamond-like carbon (DLC)/Si and frequency response characteristics were analyzed. DLC films were deposited with varying the preparation conditions (substrate bias, deposition time, and N-2 doping flow rate). The sp(3) fraction, thickness, surface roughness, and resistivity of DLC films were measured as a function deposition conditions. The center frequency of SAW device with DLC-buffer was measured to be about 575 MHz, which was much higher than that (340 MHz) of ZnO/Si(100) SAW device. The variation of center frequencies of DLC-buffer SAW devices showed the almost same trend as that of sp(3) fractions of DLC films. Decreasing the thickness of DLC buffer layers, higher electro-mechanical coupling coefficient (K-eff(2)), lower insertion loss (IL), and larger side-lobe rejection (SLR) level were obtained.

引用

页码：70 / 73

页数：4

共 11 条

[1]

Hashimoto K., 2000, SURFACE ACOUSTIC WAV, P184

[2]

KIM JY, 1997, IEEE ULTR S P, P187

[3] Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications [J].

Lee, JB ;

Lee, HJ ;

Seo, SH ;

Park, JS .

THIN SOLID FILMS, 2001, 398 :641-646

[4] Hydrogen-free amorphous carbon films: Correlation between growth conditions and properties [J].

Lifshitz, Y .

[5] THEORETICAL-STUDY ON SAW CHARACTERISTICS OF LAYERED STRUCTURES INCLUDING A DIAMOND LAYER [J].

NAKAHATA, H ;

HACHIGO, A ;

HIGAKI, K ;

FUJII, S ;

SHIKATA, SI ;

FUJIMORI, N .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1995, 42 (03) :362-375

[6] Study on surface acoustic wave characteristics of SiO2/interdigital-transducer/ZnO/diamond structure and fabrication of 2.5 GHz narrow band filter [J].

Nakahata, H ;

Kitabayashi, H ;

Uemura, T ;

Hachigo, A ;

Higaki, K ;

Fujii, S ;

Seki, Y ;

Yoshida, K ;

Shikata, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1998, 37 (5B) :2918-2922

[7]

Nakahata H., 1996, IEEE ULTR S P, P285

[8]

PARK CK, IN PRESS XPS XRR STU

[9]

Tay BK, 1999, SURF INTERFACE ANAL, V28, P231, DOI 10.1002/(SICI)1096-9918(199908)28:1<231::AID-SIA583>3.0.CO

[10]

2-3

← 1 2 →