Synthesis and characterization of liquid MOCVD precursors for thin films of cadmium oxide

被引：45

作者：

Gulino, A

Dapporto, P

Rossi, P

Fragalà, I

机构：

[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy

[2] INSTM UdR Catania, I-95125 Catania, Italy

[3] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy

来源：

CHEMISTRY OF MATERIALS | 2002年 / 14卷 / 12期

关键词：

D O I：

10.1021/cm021183m

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Four novel Cd(C5F6HO2)(2).polyether adducts were prepared through simple procedures with stoichiometric quantities of cadmium oxide, hexafluoroacetylacetone C5F6H2O2, and different polyethers. The products were characterized by elemental analysis, X-ray single-crystal analysis, mass spectra, NMR spectra, thermal measurements, and infrared transmittance spectroscopy. X-ray single-crystal data of the Cd(C5F6HO2)(2).polyether adducts showed that all the oxygen atoms of the polyether molecules coordinate the cadmium cation. Very mild heating (44-74 degreesC) resulted in thermal stable, liquid compounds which, in turn, can be easily evaporated. Gas-phase deposition experiments, in a low-pressure horizontal hot-wall reactor, on SiO2 substrates, resulted in CdO films. XRD measurements provided evidence that they consist of cubic, (100)-oriented, crystals. UV-vis spectra showed that the transmittance of as-deposited films in the visible region is about 90%.

引用

页码：4955 / 4962

页数：8

共 71 条

[41] ELECTRONIC-STRUCTURE OF THE ROCK-SALT-STRUCTURE SEMICONDUCTORS ZNO AND CDO [J].