Switching properties of self-assembled ferroelectric memory cells

被引:90
作者
Alexe, M
Gruverman, A
Harnagea, C
Zakharov, ND
Pignolet, A
Hesse, D
Scott, JF
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle, Saale, Germany
[2] Sony Corp, Frontier Sci Labs, Yokohama, Kanagawa 2400005, Japan
[3] Univ New S Wales, Sch Phys, Sydney, NSW 2052, Australia
关键词
D O I
10.1063/1.124628
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this letter, we report on the switching properties of an ordered system of Bi4Ti3O12 ferroelectric memory cells of an average lateral size of 0.18 mu m formed via a self-assembling process. The ferroelectricity of these cells has been measured microscopically and it has been demonstrated that an individual cell of 0.18 mu m size is switching. Switching of single nanoelectrode cells was achieved via scanning force microscopy working in piezoresponse mode. (C) 1999 American Institute of Physics. [S0003-6951(99)00334-4].
引用
收藏
页码:1158 / 1160
页数:3
相关论文
共 12 条
[1]   Self-patterning nano-electrodes on ferroelectric thin films for gigabit memory applications [J].
Alexe, M ;
Scott, JF ;
Curran, C ;
Zakharov, ND ;
Hesse, D ;
Pignolet, A .
APPLIED PHYSICS LETTERS, 1998, 73 (11) :1592-1594
[2]  
ALEXE M, IN PRESS APPL PHYS L
[3]  
AMMANUMA K, 1996, JPN J APPL PHYS PT 1, V35, P5229
[4]   The physics of ferroelectric memories [J].
Auciello, O ;
Scott, JF ;
Ramesh, R .
PHYSICS TODAY, 1998, 51 (07) :22-27
[5]   Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics [J].
Damjanovic, D .
REPORTS ON PROGRESS IN PHYSICS, 1998, 61 (09) :1267-1324
[6]   MODIFICATION AND DETECTION OF DOMAINS ON FERROELECTRIC PZT FILMS BY SCANNING FORCE MICROSCOPY [J].
FRANKE, K ;
BESOLD, J ;
HAESSLER, W ;
SEEGEBARTH, C .
SURFACE SCIENCE, 1994, 302 (1-2) :L283-L288
[7]  
Fukushima T., 1996, S VLSI CIRC, P46
[8]   Scanning force microscopy: Application to nanoscale studies of ferroelectric domains [J].
Gruverman, A ;
Auciello, O ;
Tokumoto, H .
INTEGRATED FERROELECTRICS, 1998, 19 (1-4) :49-83
[9]   A 60-ns 1-Mb nonvolatile ferroelectric memory with a nondriven cell plate line write/read scheme [J].
Koike, H ;
Otsuki, T ;
Kimura, T ;
Fukuma, M ;
Hayashi, Y ;
Maejima, Y ;
Amanuma, K ;
Tanabe, N ;
Matsuki, T ;
Saito, S ;
Takeuchi, T ;
Kobayashi, S ;
Kunio, T ;
Hase, T ;
Miyasaka, Y ;
Shohata, N ;
Takada, M .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1996, 31 (11) :1625-1634
[10]   RAMAN-SPECTROSCOPY OF SUB-MICRON KNO3 FILMS .2. FATIGUE AND SPACE-CHARGE EFFECTS [J].
SCOTT, JF ;
POULIGNY, B .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1547-1551