Nondestructive characterization of nanoscale layered samples

被引：7

作者：

Baake, Olaf ^{[1
]}

Hoffmann, Peter S. ^{[1
]}

Flege, Stefan ^{[1
]}

Ortner, Hugo M. ^{[1
]}

Gottschalk, Sebastian ^{[1
]}

Berky, Wolfram ^{[1
]}

Balogh, Adam G. ^{[1
]}

Ensinger, Wolfgang ^{[1
]}

Beckhoff, Burkhard ^{[2
]}

Kolbe, Michael ^{[2
]}

Gerlach, Martin ^{[2
]}

Pollakowski, Beatrix ^{[2
]}

Weser, Jan ^{[2
]}

Ulm, Gerhard ^{[2
]}

Haschke, Michael ^{[3
,4
]}

Blokhina, Elena ^{[4
]}

Peter, Markus ^{[5
]}

Porta, Dominique ^{[5
]}

Heck, Martin ^{[6
]}

机构：

[1] Tech Univ Darmstadt, Inst Mat Sci, D-64287 Darmstadt, Germany

[2] Phys Tech Bundesanstalt, D-10587 Berlin, Germany

[3] Inst Geratebau GmbH, D-12489 Berlin, Germany

[4] Rontgenanalyt Messtech GmbH, D-65232 Taunusstein, Germany

[5] BrukerAXS GmbH, D-76187 Karlsruhe, Germany

[6] Continental VDO Automot AG, D-64832 Babenhausen, Germany

来源：

ANALYTICAL AND BIOANALYTICAL CHEMISTRY | 2009年 / 393卷 / 02期

关键词：

Layers; Elements; Oxides; Purity; Sequence; Roughness; Density; Homogeneity; Thickness; XRR; RBS; WDXRF; SRXRF; mu-XRF; X-RAY-FLUORESCENCE; THICKNESS DETERMINATION; REFLECTION;

D O I：

10.1007/s00216-008-2465-2

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by means of SRXRF, mu-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e. g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, mu-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters.

引用

页码：623 / 634

页数：12

共 28 条

[1] Microscopic X-ray fluorescence analysis and related methods with laboratory and synchrotron radiation sources - Plenary lecture [J].

Adams, F ;

Janssens, K ;

Snigirev, A .

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1998, 13 (05) :319-331

[2] GEANT4-a simulation toolkit [J].

Agostinelli, S ;

Allison, J ;

Amako, K ;

Apostolakis, J ;

Araujo, H ;

Arce, P ;

Asai, M ;

Axen, D ;

Banerjee, S ;

Barrand, G ;

Behner, F ;

Bellagamba, L ;

Boudreau, J ;

Broglia, L ;

Brunengo, A ;

Burkhardt, H ;

Chauvie, S ;

Chuma, J ;

Chytracek, R ;

Cooperman, G ;

Cosmo, G ;

Degtyarenko, P ;

Dell'Acqua, A ;

Depaola, G ;

Dietrich, D ;

Enami, R ;

Feliciello, A ;

Ferguson, C ;

Fesefeldt, H ;

Folger, G ;

Foppiano, F ;

Forti, A ;

Garelli, S ;

Giani, S ;

Giannitrapani, R ;

Gibin, D ;

Cadenas, JJG ;

González, I ;

Abril, GG ;

Greeniaus, G ;

Greiner, W ;

Grichine, V ;

Grossheim, A ;

Guatelli, S ;

Gumplinger, P ;

Hamatsu, R ;

Hashimoto, K ;

Hasui, H ;

Heikkinen, A ;

Howard, A .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2003, 506 (03) :250-303

[3]

[Anonymous], ADV XRAY ANAL

[4] Determination of thickness, density and roughness of Co-Ni-Al single and multiple layer films deposited by high-vacuum e-beam evaporation on different substrates [J].

Baake, O. ;

Oeksuezoglu, R. M. ;

Flege, S. ;

Hoffmann, P. S. ;

Gottschalk, S. ;

Fuess, H. ;

Ortner, H. M. .

MATERIALS CHARACTERIZATION, 2006, 57 (01) :12-16

[5] Reference-free x-ray fluorescence analysis of an ancient Chinese ceramic [J].

Beckhoff, B. ;

Kolbe, M. ;

Hahn, O. ;

Karydas, A. G. ;

Zarkadas, Ch. ;

Sokaras, D. ;

Mantler, M. .

X-RAY SPECTROMETRY, 2008, 37 (04) :462-465

[6] Reference-free X-ray spectrometry based on metrology using synchrotron radiation [J].

Beckhoff, Burkhard .

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2008, 23 (06) :845-853

[7]

*BMBF, 2004, NAN FUT TECHN VIS GE

[8]

*BMBF, 2004, POS PAP GERM FED GOV

[9] FUNDAMENTAL PARAMETERS FOR X-RAY-FLUORESCENCE ANALYSIS [J].

DEBOER, DKG .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1989, 44 (11) :1171-1190

[10] A new atomic database for X-ray spectroscopic calculations [J].

Elam, WT ;

Ravel, BD ;

Sieber, JR .

RADIATION PHYSICS AND CHEMISTRY, 2002, 63 (02) :121-128

← 1 2 3 →