Sandwich growth of carbon nanotubes

被引:13
作者
Chen, ZX
Merikhi, J
Koehler, I
Bachmann, PK
机构
[1] Philips Res Labs, D-52066 Aachen, Germany
[2] Univ Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
关键词
D O I
10.1016/j.diamond.2005.07.024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Direct formation of structures that comprise freestanding CNTs connected to two surfaces was, thus far, not possible. In this article we report a novel approach to grow structured, highly oriented carbon nanotubes that are vertically aligned between a substrate and a massive cover. Growth is feasible at pre-determined, e.g., lithographically defined sites on metallic, semiconducting, or glass substrates. A novel, sandwiched catalyst structure and microwave plasma chemical vapor deposition (CVD) led to the formation of freestanding, small diameter carbon nanotubes. Our new technology offers a simple and scalable pathway to create 3D structured nanotube-based two-terminal electronic devices, device arrays, sensors and corresponding electronic circuits. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:104 / 108
页数:5
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