Formation of nanostructured titania: Effect of thickness on oxidation kinetics of titanium thin films on aqueous hydrogen peroxide

被引：7

作者：

DeRosa, DM ^{[1
]}

Zuruzi, AS

MacDonald, NC

机构：

[1] Univ Arizona, Biosyst Engn Dept, Tucson, AZ 85721 USA

[2] Univ Calif Santa Barbara, Natl Nanofabricat Infrastruct Network, Santa Barbara, CA 93106 USA

[3] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

[4] Univ Calif Santa Barbara, Dept Mech & Environm Engn, Santa Barbara, CA 93106 USA

来源：

ADVANCED ENGINEERING MATERIALS | 2006年 / 8卷 / 1-2期

关键词：

D O I：

10.1002/adem.200500186

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The oxidation kinetics of Ti films of thickness from 25 to 200 nm in 10% aqueous hydrogen peroxide solution was investigated. Thickness of Ti films deposited was measured using a quartz crystal monitor and verified using x-ray reflectivity during evaporation. Calibration was done by comparing resistivity values calculated from extracted RTi values of Ti films soaked in DI water. The results showed that the oxidation of Ti films was dependent on both film thickness and average grain size.

引用

页码：77 / 80

页数：4

共 19 条

[1] In situ imaging and impedance measurements of titanium surfaces using AFM and SPIS [J].