CRYSTAL-STRUCTURES AND ELECTRICAL-PROPERTIES OF TITANIUM FILMS EVAPORATED IN HIGH-VACUUM

被引：25

作者：

IGASAKI, Y

MITSUHASHI, H

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(78)90212-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：33 / 42

页数：10

共 18 条

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HUBER, F
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[7] IGASAKI Y, 1973, B RES I ELEKTRON SHI, V7, P153
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