The spin-valve transistor: technologies and progress

被引:16
作者
Lodder, JC
Monsma, DJ
Vlutters, R
Shimatsu, T
机构
[1] Univ Twente, MESA, Res Inst, Informat Storage Technol Grp, NL-7500 AE Enschede, Netherlands
[2] Tohoku Univ, Res Inst Elect Commun, Sendai, Miyagi 9808577, Japan
关键词
spin-valve transistor; spin-valve effect; CPP-GMR; metal bonding technology;
D O I
10.1016/S0304-8853(98)01241-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The paper describes the necessary technologies needed for realising a RT operating spin-valve transistor (SVT) which is in fact a magnetic controlled metal base transistor. The preparation of a 350 x 350 mu m(2) SVT consisting of an Si emitter and collector and Co/Cu/Co GMR multilayer are described. The metal bonding technology in vacuum is described, which is essential for preparing small SVTs with photolithography and etching technologies. The quality of the bonding interfaces as well as the interface between GMR layer and semiconductor are important for the electrical properties. In more general terms the SVT research also establishes the feasibility of various hybrid structures combining semiconductor technology and spin electronics. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:119 / 124
页数:6
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