A novel micromechanical flow controller

被引：4

作者：

vanToor, MW

Lammerink, TSJ

Gardeniers, JGE

Elwenspoek, M

Monsma, D

机构：

[1] MESA Research Institute, University of Twente, Dept. of Elec. Eng./Applied Physics, 7500 AE Enschede

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期

关键词：

D O I：

10.1088/0960-1317/7/3/023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.

引用

页码：165 / 169

页数：5

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