Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides

被引:19
作者
Foubert, Kevin [1 ,2 ]
Lalouat, Loic [1 ]
Cluzel, Benoit [1 ]
Picard, Emmanuel [2 ]
Peyrade, David [3 ]
Delamadeleine, Eric [2 ]
de Fornel, Frederique [1 ]
Hadji, Emmanuel [2 ]
机构
[1] CNRS, UMR 5209, ICB OCP, F-21078 Dijon, France
[2] CEA, INAC SP2M, SiNaPS, F-38054 Grenoble 9, France
[3] CNRS, LTM, F-38054 Grenoble 9, France
关键词
elemental semiconductors; Fourier transform optics; image resolution; integrated optics; near-field scanning optical microscopy; optical waveguides; silicon; silicon-on-insulator; slot lines;
D O I
10.1063/1.3040012
中图分类号
O59 [应用物理学];
学科分类号
摘要
Silicon-on-insulator slot waveguides are studied by scanning near-field optical microscopy. Images of the standing wave pattern were established experimentally and compared with numerical simulations. Fourier analysis along the propagation direction reveals noticeable frequencies both on the experiment and the computation that could be related not only to the guided mode but also to beating phenomena between the coupled waveguides. Finally, light confinement above the slot is directly visualized with a subwavelength resolution and is compared with the expected field distribution.
引用
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页数:3
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