Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses

被引：165

作者：

Viens, JF

Meneghini, C

Villeneuve, A

Galstian, TV

Knystautas, ÉJ

Duguay, MA

Richardson, KA

Cardinal, T

机构：

[1] Univ Laval, Ctr Opt Photon & Laser, Ste Foy, PQ G1K 7P4, Canada

[2] Univ Cent Florida, Creol, Orlando, FL 32816 USA

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1999年 / 17卷 / 07期

基金：

加拿大自然科学与工程研究理事会;

关键词：

chalcogenide glasses; glass photosensitivity; ion implantation; photolithography; waveguides;

D O I：

10.1109/50.774252

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.

引用

页码：1184 / 1191

页数：8

共 14 条

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