As-grown deposition of superconducting MgB2 thin films by multiple-target sputtering system

被引：71

作者：

Saito, A ^{[1
]}

Kawakami, A ^{[1
]}

Shimakage, H ^{[1
]}

Wang, Z ^{[1
]}

机构：

[1] Kansai Adv Res Ctr, Commun Res Lab, Nishi Ku, Kobe, Hyogo 6512492, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2002年 / 41卷 / 2A期

关键词：

B; Mg; MgB2 thin films; multiple-target sputtering system; critical temperatures;

D O I：

10.1143/JJAP.41.L127

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

As-grown superconducting MgB2 thin films were prepared using a multiple-target sputtering system. The targets were pure B and Mg metal. The MgB2 thin films were deposited at substrate temperatures (T-s) ranging from 207degreesC to 268degreesC on Al2O3 (1102) substrates. We found that the critical temperatures (T-c) of the films were increased with increase of the T-s. The film grown at a T-s of 252degreesC showed the highest T-e,T-onset value of 27.8 K and had a sharp transition (DeltaT(c) = 0.5 K) in the resistivity.

引用

页码：L127 / L129

页数：3

共 6 条

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