Composite infrared bolometers with Si3N4 micromesh absorbers

被引：127

作者：

Mauskopf, PD ^{[1
]}

Bock, JJ ^{[1
]}

DelCastillo, H ^{[1
]}

Holzapfel, WL ^{[1
]}

Lange, AE ^{[1
]}

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

来源：

APPLIED OPTICS | 1997年 / 36卷 / 04期

关键词：

infrared bolometers; silicon nitride; micromesh;

D O I：

10.1364/AO.36.000765

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report the design and performance of 300-mK composite bolometers that use micromesh absorbers and support structures patterned from thin films of low-stress silicon nitride. The small geometrical filling factor of the micromesh absorber provides 20x reduction in heat capacity and cosmic ray cross section relative to a solid absorber with no loss in IR-absorption efficiency. The support structure is mechanically robust and has a thermal conductance, G < 2 x 10(-11) W/K, which is four times smaller than previously achieved at 300 mK. The temperature rise of the bolometer is measured with a neutron transmutation doped germanium thermistor attached to the absorbing mesh. The dispersion in electrical and thermal parameters of a sample of 12 bolometers optimized for the Sunyaev-Zel'dovich Infrared Experiment is +/-7% in R(T), +/-5% in optical efficiency, and +/-4% in G. (C) 1997 Optical Society of America

引用

页码：765 / 771

页数：7

共 18 条

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