Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode

被引：7

作者：

Tanaka, Y ^{[1
]}

Iizuka, S ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Elect Engn, Sendai, Miyagi 9808579, Japan

来源：

THIN SOLID FILMS | 2006年 / 506卷

关键词：

micro-plasma; atmospheric pressure discharge; RF impulse discharge;

D O I：

10.1016/j.tsf.2005.08.034

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In order to achieve inner wall surface treatment of glass tube of micrometer and gas decomposition flowing through a small diameter glass tube, a micro-plasma is useful. We have developed a new method for producing a micro-plasma in order to apply to the surface treatment and micro-plasma CVD on the inner wall surface of a micro-glass tube at atmospheric pressure. The plasma is produced by using a coaxial microelectrode to which RF impulse is applied. We have elucidated fundamental characteristics of the discharge and optimized the electrode configuration. We find that breakdown voltage can be decreased with a decrease in the diameter of the inner electrode. We also clarified the effect of gas species and flow rate on the discharge. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：436 / 439

页数：4

共 11 条

[1] Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma [J].

Fujiyama, H ;

Tokitu, Y ;

Uchikawa, Y ;

Kuwahara, K ;

Miyake, K ;

Kuwahara, K ;

Doi, A .

SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3) :1467-1472

[2] Surface modification for biomedical purposes utilizing dielectric barrier discharges at atmospheric pressure [J].

Gessner, C ;

Bartels, V ;

Betker, T ;

Matucha, U ;

Penache, C ;

Klages, CP .

THIN SOLID FILMS, 2004, 459 (1-2) :118-121

[3] Diagnosis of atmospheric pressure low temperature plasma and application to high efficient methane conversion [J].

Kado, S ;

Sekine, Y ;

Nozaki, T ;

Okazaki, K .

CATALYSIS TODAY, 2004, 89 (1-2) :47-55

[4] Development of the RF plasma source at atmospheric pressure [J].

Kang, JG ;

Kim, HS ;

Ahn, SW ;

Uhm, HS .

SURFACE & COATINGS TECHNOLOGY, 2003, 171 (1-3) :144-148

[5] Characterisations of atmospheric pressure ejected plasma sources [J].

Kim, YH ;

Choi, YH ;

Kim, JH ;

Park, JK ;

Ju, WT ;

Paek, KH ;

Hwang, YS .

SURFACE & COATINGS TECHNOLOGY, 2003, 174 :535-540

[6] Ozone, ammonia and NOx destruction in corona discharge tubes coated with ozone catalyst [J].

Kogoma, M ;

Okazaki, S ;

Tanaka, K ;

Inomata, T .

THIN SOLID FILMS, 2001, 386 (02) :200-203

[7] Polymer deposition using atmospheric pressure plasma glow (APG) discharge [J].

Prat, R ;

Koh, YJ ;

Babukutty, Y ;

Kogoma, M ;

Okazaki, S ;

Kodama, M .

POLYMER, 2000, 41 (20) :7355-7360

[8]

RAIZER YP, 1991, GAS DISCHARGE PHYSIC, P209

[9]

Roth J. R., 1995, IND PLASMA ENG, V1, P237

[10] Titanium coating of the inner of a 1 m long narrow tube by double-ended anode coaxial magnetron-pulsed plasmas [J].

Uchikawa, Y ;

Sugimoto, S ;

Kuwahara, K ;

Fujiyama, H ;

Kuwahara, H .

SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3) :185-188

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