High performance HgCdTe two-color infrared detectors grown by molecular beam epitaxy

被引:41
作者
Rajavel, RD [1 ]
Jamba, DM [1 ]
Wu, OK [1 ]
Jensen, JE [1 ]
Wilson, JA [1 ]
Patten, EA [1 ]
Kosai, K [1 ]
Goetz, P [1 ]
Chapman, GR [1 ]
Radford, WA [1 ]
机构
[1] SANTA BARBARA RES CTR,GOLETA,CA 93117
关键词
MBE; HgCdTe; in situ doped; sequential; two-color detector; multispectral;
D O I
10.1016/S0022-0248(96)01200-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
High-performance in situ doped two-color detectors with the n-p-n architecture for the sequential detection of mid- and long-wave infrared radiation were grown by molecular beam epitaxy. These detector structures were twin-free, and exhibited narrow rocking curves (approximate to 45 arcsec) as determined by X-ray measurements. The near surface etch pit densities in these device structures were typically (2-3) x 10(6) cm(-2). The structures were processed as mesas and their electrical properties measured. The spectral response of the mid-wave and long-wave diodes in the integrated detector were characterized by sharp turn-on and turn-off in both bands. Average R(0)A values of 100 Omega cm(2) at 10.5 mu m and 5.5 x 10(5) Omega cm(2) at 5.5 mu m were measured at 77 K. These results are comparable to those of the best unispectral detectors and represents a significant milestone for MBE-grown HgCdTe two-color devices.
引用
收藏
页码:653 / 658
页数:6
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