Polymer-reinforced, aligned multiwalled carbon nanotube composites for microelectromechanical systems applications

被引:38
作者
Fang, WL
Chu, HY
Hsu, WK
Cheng, TW
Tai, NH
机构
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan
[2] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
关键词
D O I
10.1002/adma.200501305
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Aligned multiwalled carbon nanotube (MWNT)-polymer composites are synthesized for use in microelectromechanical systems (MEMS) applications. Indentation and bending tests reveal that the elastic modulus of the MWNT-MEMS devices is promoted by a factor of 20. Dynamic bending experiments show that MWNT-MEMS devices can be driven at a lower pull-in voltage compared with classical devices. Complex and delicate MWNT-MEMS devices can also be fabricated (see Figure).
引用
收藏
页码:2987 / +
页数:7
相关论文
共 12 条
[1]  
Andrews R, 2002, MACROMOL MATER ENG, V287, P395, DOI 10.1002/1439-2054(20020601)287:6<395::AID-MAME395>3.0.CO
[2]  
2-S
[3]  
[Anonymous], CARBON
[4]   Self-oriented regular arrays of carbon nanotubes and their field emission properties [J].
Fan, SS ;
Chapline, MG ;
Franklin, NR ;
Tombler, TW ;
Cassell, AM ;
Dai, HJ .
SCIENCE, 1999, 283 (5401) :512-514
[5]   Determining mean and gradient residual stresses in thin films using micromachined cantilevers [J].
Fang, W ;
Wickert, JA .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (03) :301-309
[6]  
Hull D., 1981, INTRO COMPOSITE MAT, V1st
[7]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[8]  
Meirovitch L, 1967, ANAL METHODS VIBRATI
[9]   MEASUREMENT OF THIN-FILM MECHANICAL-PROPERTIES USING NANOINDENTATION [J].
PHARR, GM ;
OLIVER, WC .
MRS BULLETIN, 1992, 17 (07) :28-33
[10]  
Qian D., 2002, APPL MECH REV, V55, P495, DOI [DOI 10.1115/1.1490129, 10.1115/1.1490129]