Micro-electro-mechanical deformable mirrors for aberration control in optical systems

被引：14

作者：

Roggemann, MC ^{[1
]}

Bright, VM

Welsh, BM

Cowan, WD

Lee, M

机构：

[1] Michigan Technol Univ, Dept Elect Engn, Houghton, MI 49931 USA

[2] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

[3] Mission Res Corp, Dayton, OH USA

[4] USAF, Inst Technol, Dept Elect & Comp Engn, Wright Patterson AFB, OH 45433 USA

来源：

OPTICAL AND QUANTUM ELECTRONICS | 1999年 / 31卷 / 5-7期

关键词：

aberration control; deformable mirrors; micro-electro-mechanical systems;

D O I：

10.1023/A:1006967012137

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Controlling optical aberrations is one of the enduring problems in optics. Recent advances in adaptive optics for astronomical applications have shown the promise of adaptive optics technology for controlling aberrations. Micro-electro-mechanical deformable mirrors (MEM-DMs) offer an alternative to conventional adaptive optics which, due to the inexpensive nature of MEM-DM technology, will enable a wide range of commercial and scientific applications for optical wave front control. In this paper we describe MEM-DMs, present results of modelling the performance of an MEM-DM for optical aberration control, and present results of experiments to verify that MEM-DMs can control optical aberrations.

引用

页码：451 / 468

页数：18