Monolayer MoS2 Transistors Beyond the Technology Road Map

The performance of a 5-nm gate length monolayer MoS2 transistor is benchmarked against an ultrathin body Si transistor of similar dimensions and the ITRS requirements for 2026 low operating power (LOP) technology. The MoS2 transistor has a subthreshold slope of 70 mV/dec, an ON-/OFF-current ratio of 4.8 x 10(4), a drive current of 238 mu A/mu m, a peak transconductance of 2.65 mS/mu m, a total capacitance of 0.164 fF/mu m, and an intrinsic switching delay of 0.276 ps. These numbers for the silicon competitor are 79 mV/dec, 1.8 x 10(4), 89 mu A/mu m, 1.22 mS/mu m, 0.0733 fF/mu m, and 0.331 ps, respectively. The heavier effective mass of the MoS2 significantly reduces the direct source-drain leakage current, and it increases the drive current and the transconductance. The performance metrics of MoS2 transistor are comparable to the ITRS 2026 LOP technology requirements.