Reliability of polycrystalline silicon under long-term cyclic loading

被引：9

作者：

Bagdahn, J ^{[1
]}

Sharpe, WN ^{[1
]}

机构：

[1] Johns Hopkins Univ, Dept Mech Engn, Baltimore, MD 21218 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984299

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The long-term mechanical behavior of 3.5 mum thick and 50 mum wide polysilicon tensile specimens under tension-tension cyclic loading was investigated. The initial fracture strength, a, was 1.1 GPa. If the applied maximum cyclic stress was reduced by about 35 % to a value of sigma(f) = 0.75 GPa, the specimens failed after 108 cycles. No influence of frequency in the range of 50 to 1000 Hz was observed.

引用

页码：447 / 450

页数：4

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