Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens

被引:125
作者
Kahn, H
Ballarini, R
Mullen, RL
Heuer, AH
机构
[1] Case Western Reserve Univ, Dept Mat Sci & Engn, Cleveland, OH 44106 USA
[2] Case Western Reserve Univ, Dept Civil Engn, Cleveland, OH 44106 USA
来源
PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1999年 / 455卷 / 1990期
关键词
polysilicon; fracture; fatigue; microfracture; electrostatic actuation; microelectromechanical systems (MEMS);
D O I
10.1098/rspa.1999.0478
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Polysilicon fracture mechanics specimens have been fabricated using standard microelectromechanical systems (MEMS) processing techniques, and thus have characteristic dimensions comparable with typical MEMS devices. These specimens are fully integrated with simultaneously fabricated electrostatic actuators, which are capable of providing sufficient force to ensure catastrophic crack propagation from blunt notches produced using micromachining. Thus, the entire fracture experiment takes place on-chip, without any external loading source. Fracture has been initiated using both monotonic and cyclic resonance loading. A reduction in the nominal toughness under cyclic loading is attributed to subcritical growth of sharp cracks from the micromachined notches in the fracture mechanics specimens. Fatigue fracture has been observed in specimens subjected to as many as 10(9) cycles, and environmental corrosion is implicated in at least some aspects of the fatigue.
引用
收藏
页码:3807 / 3823
页数:17
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