GROWTH AND PHYSICAL-PROPERTIES OF LPCVD POLYCRYSTALLINE SILICON FILMS

被引：237

作者：

HARBEKE, G ^{[1
]}

KRAUSBAUER, L ^{[1
]}

STEIGMEIER, EF ^{[1
]}

WIDMER, AE ^{[1
]}

KAPPERT, HF ^{[1
]}

NEUGEBAUER, G ^{[1
]}

机构：

[1] UNIV DORTMUND,INST PHYS,D-4600 DORTMUND 50,FED REP GER

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 03期

关键词：

D O I：

10.1149/1.2115672

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：675 / 682

页数：8

共 25 条

[1] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[2]

AZAROFF LV, 1968, ELEMENTS XRAY CRYSTA, P556

[3]

Brill R, 1928, Z KRISTALLOGR, V68, P387

[4]

BROWN WA, 1979, SOLID STATE TECHNOL, V22, P51

[5]

CHIANG KL, 1979, J ELCHEM SO, V128, P2267

[6] MEASUREMENT OF CORRELATION BETWEEN SPECULAR REFLECTANCE AND SURFACE-ROUGHNESS OF AG FILMS [J].

CUNNINGHAM, LJ ;

BRAUDMEIER, AJ .

PHYSICAL REVIEW B, 1976, 14 (02) :479-483

[7] THE REFLECTION OF ELECTROMAGNETIC WAVES FROM A ROUGH SURFACE [J].

DAVIES, H .

PROCEEDINGS OF THE INSTITUTION OF ELECTRICAL ENGINEERS-LONDON, 1954, 101 (07) :209-214

[8] MEASUREMENT OF THE NEAR-SURFACE CRYSTALLINITY OF SILICON ON SAPPHIRE BY UV REFLECTANCE [J].

DUFFY, MT ;

CORBOY, JF ;

CULLEN, GW ;

SMITH, RT ;

SOLTIS, RA ;

HARBEKE, G ;

SANDERCOCK, JR ;

BLUMENFELD, M .

JOURNAL OF CRYSTAL GROWTH, 1982, 58 (01) :10-18

[9]

FALCKENBERG R, 1979, ELECTROCHEMICAL SOC, V79, P1429

[10]

GIESKE RJ, 1977, CHEM VAPOR DEPOSITIO, P183

← 1 2 3 →